CD
Critical Dimension
CD is a controlled dimension, such as line width or hole diameter, important to device or interconnect function.
Other learning contexts (2)
In context
CD after development and CD after etching differ in measurement stage and material. Even the same value can mean different things depending on the height and location measured.
Example
When told that line width is correct, check whether this refers to photoresist or the actual processed layer. Different measurement targets and criteria also change how process changes are interpreted.
Key distinction
Specify material, process stage, and measurement criteria alongside the CD value.
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