FDC
Fault Detection and Classification
A process control function that uses detailed data collected from equipment and processes to detect abnormal states quickly and classify anomaly types.
Other learning contexts (5)
In context
Understand it in the context of using equipment sensor records to find abnormal behavior before wafer results deteriorate.
Example
FDC can detect an anomaly if a particular chamber's pressure or temperature records deviate from the model used to distinguish normal from abnormal conditions. Related terms: Statistical process control / Advanced process control (APC) / Process excursion
Key distinction
Distinguish FDC as anomaly detection and classification, and SPC as statistical monitoring of process stability.
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