FOUP

Front Opening Unified Pod

A front-opening carrier that stores and transports 300 mm wafers while protecting them from contamination. It is a representative container that holds wafer lots between automated material handling systems and equipment.

Other learning contexts (5)

Connection between a wafer FOUP, an equipment load port and a mini-environment — Conceptual relationship between a FOUP, load port and mini-environment. It does not specify actual internal equipment design or wafer capacity.

In context

For fab automation questions, first distinguish FOUP as "the box containing wafers" and OHT as "the vehicle that moves that box."

Example

A FOUP holds multiple wafers, and an OHT transports it to the next process tool. Related terms: Overhead hoist transport / Automated material handling system / Load port / Wafer lot

Key distinction

A FOUP is a carrier, while an OHT is a transport vehicle that moves the carrier.

From the same lessons

Semiconductor Integrated Circuit (IC) Chip Memory Semiconductor System Semiconductor IDM Foundry Fabless

Explore this field

View map ↗

22 planned packsFocus topicLearning pathView packs ↗